1 : in communications and control of semiconductor manufacturing equipment, an event or grouping of related events on the equipment that is considered to be significant to the host. [SEMI E30-94] 2 : in equipment communications, an event that may be used to initiate the collection and reporting of data. A collection eventmay trigger an event report. A collection eventmay also start or stop one or more trace reports. [SEMI 2309, proposed]
